The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Jun. 22, 2008
Applicants:

Steven M. George, Boulder, CO (US);

Arrelaine Allen Dameron, Boulder, CO (US);

Beau B. Burton, Columbia, MD (US);

Markus D. Groner, Louisville, CO (US);

Inventors:

Steven M. George, Boulder, CO (US);

Arrelaine Allen Dameron, Boulder, CO (US);

Beau B. Burton, Columbia, MD (US);

Markus D. Groner, Louisville, CO (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 7/02 (2006.01); C23C 16/22 (2006.01); B05D 5/12 (2006.01); H01L 51/00 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0097 (2013.01); C23C 16/402 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); C23C 28/00 (2013.01); C23C 28/04 (2013.01); C23C 28/42 (2013.01); H01L 51/5256 (2013.01); H01L 51/5237 (2013.01); H01L 2251/5338 (2013.01); Y02E 10/549 (2013.01); Y10T 428/2495 (2015.01); Y10T 428/26 (2015.01);
Abstract

Coatings are applied on a flexible substrate using atomic layer deposition and molecular layer deposition methods. The coatings have thickness of up to 100 nanometers. The coatings include layers of an inorganic material such as alumina, which are separated by flexibilizing layers that are deposited with covalent chemical linkage to the inorganic material and which are one or more of silica deposited by an atomic layer deposition process; an organic polymer that is deposited by a molecular layer deposition process, or a hybrid organic-inorganic polymer that is deposited by an molecular layer deposition process.


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