The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Feb. 04, 2016
Applicant:

Fuji Electric Co., Ltd., Kanagawa, JP;

Inventor:

Masaru Saito, Nagano, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 23/52 (2006.01); H01L 49/02 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 28/20 (2013.01); H01L 23/5228 (2013.01); H01L 27/0629 (2013.01);
Abstract

A semiconductor device includes: a semiconductor substrate; and a thin film resistor formed over an upper surface of the semiconductor substrate, the thin film resistor including first thin film resistor units and second thin film resistor units alternately connected in series, each of the first thin film resistor units having an elongated main portion and end portions that are connected to the elongated main portion, the end portions each forming a U-shape together with the elongated main portion in a plan view, and respectively overlapping with two of the second thin film resistor units that are adjacent to and connected to the first thin film resistor unit in series.


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