The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Jul. 08, 2014
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, The Hague, NL;

Inventors:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/768 (2006.01); C23C 14/04 (2006.01); H01L 21/285 (2006.01); B23K 26/08 (2014.01); B23K 26/34 (2014.01); C23C 14/54 (2006.01); B23K 26/32 (2014.01); B23K 26/082 (2014.01); B23K 26/0622 (2014.01); G05B 19/418 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); B23K 101/40 (2006.01); B23K 103/08 (2006.01); B23K 103/10 (2006.01); B23K 103/12 (2006.01); B23K 103/18 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76898 (2013.01); B23K 26/0622 (2015.10); B23K 26/082 (2015.10); B23K 26/0853 (2013.01); B23K 26/32 (2013.01); B23K 26/34 (2013.01); C23C 14/048 (2013.01); C23C 14/54 (2013.01); G05B 19/418 (2013.01); H01L 21/2855 (2013.01); H01L 21/68 (2013.01); H01L 21/68785 (2013.01); H01L 21/76838 (2013.01); B23K 2201/40 (2013.01); B23K 2203/08 (2013.01); B23K 2203/10 (2013.01); B23K 2203/12 (2013.01); B23K 2203/18 (2013.01); B23K 2203/50 (2015.10); B23K 2203/56 (2015.10); G05B 2219/33198 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A method for providing position control information for controlling an impingement position of a laser beam for treatment of a chip die in a chip manufacturing process, comprises the steps of a) receiving a specification of positions (x,y) of a electrically conductive elements in the chip die, the positions having a first coordinate along a first direction (x) and a second coordinate (y) along a second direction in a plane defined by the chip die, said first and second direction being mutually transverse to each other, b) selecting a cluster of positions that is within a predetermined two-dimensional spatial range, wherein each pair of positions in the cluster at least has a first minimum difference in their first coordinates or a second minimum difference in their second coordinates and removing the next position from the ordered set, c) update the positions of the set of positions in accordance with an expected time needed to carry out the treatment for said cluster and a speed of a wafer comprising the chip die, d) repeating steps b-d until each of the positions in said set is assigned to a cluster.


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