The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Feb. 18, 2014
Applicant:

Analog Devices Global, Hamilton, BM;

Inventors:

Check F. Lee, Bedford, MA (US);

Raymond C. Goggin, Watergrasshill, IE;

Padraig L. Fitzgerald, Mallow, IE;

Assignee:

Analog Devices Global, Hamilton, BM;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); B81B 7/04 (2006.01); H01H 1/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H01H 59/00 (2006.01); H01P 1/12 (2006.01);
U.S. Cl.
CPC ...
H01H 1/0036 (2013.01); B81B 7/0064 (2013.01); B81C 1/00698 (2013.01); H01H 59/0009 (2013.01); H01P 1/127 (2013.01); B81B 2201/014 (2013.01); B81B 2207/03 (2013.01); B81B 2207/07 (2013.01); B81B 2207/115 (2013.01); B81C 2201/0171 (2013.01); B81C 2203/075 (2013.01);
Abstract

A MEMS apparatus has a substrate, an input node, an output node, and a MEMS switch between the input node and the output node. The switch selectively connects the input node and the output node, which are electrically isolated when the switch is open. The apparatus also has an input doped region in the substrate and an output doped region in the substrate. The input doped region and output doped region are electrically isolated through the substrate—i.e., the resistance between them inhibits non-negligible current flows between the two doped regions. The input doped region forms an input capacitance with the input node, while the output doped region forms an output capacitance with the output node.


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