The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Oct. 10, 2013
Applicant:

Memsic, Inc., Andover, MA (US);

Inventors:

Yongyao Cai, Acton, MA (US);

Leyue Jiang, China, CN;

Paul Zavracky, Boston, MA (US);

Yang Zhao, Andover, MA (US);

Shuo Gu, Andover, MA (US);

Assignee:

MEMSIC, INC, Andover, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2006.01); G01R 33/09 (2006.01); G01R 33/00 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0206 (2013.01); G01R 33/00 (2013.01); G01R 33/0005 (2013.01); G01R 33/096 (2013.01);
Abstract

A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.


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