The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

May. 11, 2015
Applicants:

Corning Precision Materials Co., Ltd., Chungcheongnam-do, KR;

Zs-handling Gmbh, Regensburg, DE;

Inventors:

Chan-Kyu Kim, Chungcheongnam-do, KR;

Adolf Zitzmann, Regensburg, DE;

KiNam Kim, Chungcheongnam-do, KR;

Josef Zimmermann, Regensburg, DE;

Michael Schilp, Regensburg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 41/00 (2006.01); B24B 41/06 (2012.01); B25B 11/00 (2006.01); B23Q 3/08 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); B65G 47/91 (2006.01);
U.S. Cl.
CPC ...
B24B 41/005 (2013.01); B23Q 3/088 (2013.01); B24B 41/06 (2013.01); B25B 11/005 (2013.01); B65G 47/911 (2013.01); H01L 21/67051 (2013.01); H01L 21/6838 (2013.01); H01L 21/67126 (2013.01);
Abstract

A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.


Find Patent Forward Citations

Loading…