The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Dec. 01, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Yi-Koan Hong, Suwon-si, KR;

Yeun-Sang Park, Yongin-si, KR;

Byung-Lyul Park, Seoul, KR;

Joo-Hee Jang, Hwaseong-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/02 (2006.01); H01L 31/0232 (2014.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02005 (2013.01); H01L 24/06 (2013.01); H01L 24/29 (2013.01); H01L 24/30 (2013.01); H01L 24/32 (2013.01); H01L 24/80 (2013.01); H01L 24/83 (2013.01); H01L 24/91 (2013.01); H01L 31/02327 (2013.01); H01L 24/05 (2013.01); H01L 2224/04026 (2013.01); H01L 2224/05547 (2013.01); H01L 2224/05557 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/06505 (2013.01); H01L 2224/08121 (2013.01); H01L 2224/08147 (2013.01); H01L 2224/27416 (2013.01); H01L 2224/27602 (2013.01); H01L 2224/29011 (2013.01); H01L 2224/29013 (2013.01); H01L 2224/29014 (2013.01); H01L 2224/29022 (2013.01); H01L 2224/2929 (2013.01); H01L 2224/3013 (2013.01); H01L 2224/3014 (2013.01); H01L 2224/3015 (2013.01); H01L 2224/3016 (2013.01); H01L 2224/30051 (2013.01); H01L 2224/32147 (2013.01); H01L 2224/80895 (2013.01); H01L 2224/80896 (2013.01); H01L 2224/80903 (2013.01); H01L 2224/8388 (2013.01); H01L 2224/83193 (2013.01);
Abstract

In a method for fabricating a semiconductor, a first conductive pattern structure partially protruding upwardly from first insulating interlayer is formed in first insulating interlayer. A first bonding insulation layer pattern covering the protruding portion of first conductive pattern structure is formed on first insulating interlayer. A first adhesive pattern containing a polymer is formed on first bonding insulation layer pattern to fill a first recess formed on first bonding insulation layer pattern. A second bonding insulation layer pattern covering the protruding portion of second conductive pattern structure is formed on second insulating interlayer. A second adhesive pattern containing a polymer is formed on second bonding insulation layer pattern to fill a second recess formed on second bonding insulation layer pattern. The first and second adhesive patterns are melted. The first and second substrates are bonded with each other so that the conductive pattern structures contact each other.


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