The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Apr. 13, 2015
Applicant:

Panasonic Liquid Crystal Display Co., Ltd., Himeji, Hyogo, JP;

Inventors:

Hironori Yasukawa, Hyogo, JP;

Genshiro Kawachi, Hyogo, JP;

Tomoya Kato, Hyogo, JP;

Kazuo Kita, Hyogo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 27/12 (2006.01); G02F 1/1368 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); G02F 1/1362 (2006.01); G02F 1/1343 (2006.01);
U.S. Cl.
CPC ...
H01L 27/127 (2013.01); G02F 1/1368 (2013.01); G02F 1/136227 (2013.01); H01L 27/1222 (2013.01); H01L 27/1225 (2013.01); H01L 27/1266 (2013.01); H01L 27/1292 (2013.01); H01L 29/66666 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01); G02F 2001/134372 (2013.01);
Abstract

A method of manufacturing a display device includes: forming a gate electrode on a substrate; forming a gate insulating film on the substrate; forming an oxide semiconductor on the substrate; forming a source electrode and a drain electrode on the substrate; forming a passivation film on the substrate; forming a common electrode on the substrate; forming an interlayer insulating film on the substrate; forming a pixel electrode on the substrate; forming an alignment film on the substrate; radiating UV-rays onto the oxide semiconductor; and heat-treating the oxide semiconductor irradiated with the UV-rays. The radiating UV-rays is performed after the forming an oxide semiconductor, and the heat-treating is performed after the forming a passivation film.


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