The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Nov. 05, 2015
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Digh Hisamoto, Kokubunji, JP;

Shinichi Saito, Southampton, GB;

Akio Shima, Hino, JP;

Hiroyuki Yoshimoto, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 21/8249 (2006.01); H01L 21/84 (2006.01); H01L 27/06 (2006.01); H01L 27/07 (2006.01); H01L 27/092 (2006.01); H01L 27/11 (2006.01); H01L 27/11521 (2017.01); H01L 27/11568 (2017.01); H01L 29/66 (2006.01); H01L 29/788 (2006.01); H01L 29/792 (2006.01); G11C 16/04 (2006.01); H01L 23/535 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01); H01L 29/73 (2006.01); H01L 27/102 (2006.01); G11C 11/412 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1203 (2013.01); G11C 16/0408 (2013.01); H01L 21/8249 (2013.01); H01L 21/84 (2013.01); H01L 23/535 (2013.01); H01L 27/0623 (2013.01); H01L 27/0705 (2013.01); H01L 27/092 (2013.01); H01L 27/11 (2013.01); H01L 27/11521 (2013.01); H01L 27/11568 (2013.01); H01L 29/0649 (2013.01); H01L 29/0804 (2013.01); H01L 29/0821 (2013.01); H01L 29/0847 (2013.01); H01L 29/0895 (2013.01); H01L 29/1004 (2013.01); H01L 29/1033 (2013.01); H01L 29/66825 (2013.01); H01L 29/66833 (2013.01); H01L 29/7311 (2013.01); H01L 29/788 (2013.01); H01L 29/792 (2013.01); G11C 11/412 (2013.01); H01L 27/1025 (2013.01); H01L 27/1026 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Provided is a semiconductor element having, while maintaining the same integratability as a conventional MOSFET, excellent switch characteristics compared with the MOSFET, that is, having the S-value less than 60 mV/order at room temperature. Combining the MOSFET and a tunnel bipolar transistor having a tunnel junction configures a semiconductor element that shows an abrupt change in the drain current with respect to a change in the gate voltage (an S-value of less than 60 mV/order) even at a low voltage.


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