The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
May. 30, 2012
Vadim Boguslavskiy, Princeton, NJ (US);
Joshua Mangum, Sarasota, FL (US);
Matthew King, Montville, NJ (US);
Earl Marcelo, Southfield, NJ (US);
Eric A. Armour, Pennington, NJ (US);
Alexander I. Gurary, Bridgewater, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Guray Tas, Flanders, NJ (US);
Vadim Boguslavskiy, Princeton, NJ (US);
Joshua Mangum, Sarasota, FL (US);
Matthew King, Montville, NJ (US);
Earl Marcelo, Southfield, NJ (US);
Eric A. Armour, Pennington, NJ (US);
Alexander I. Gurary, Bridgewater, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Guray Tas, Flanders, NJ (US);
Veeco Instruments Inc., Plainview, NY (US);
Abstract
An apparatus includes a carrier rotatable about an axis of rotation where the carrier has a top surface adapted to hold at least one semiconductor wafer and a surface characterization tool which is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation. The surface characterization tool is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation and is further adapted to produce characterization signals over the plurality of positions on at least a portion of the carrier and/or on at least a portion of said major surface of the wafer as the carrier rotates.