The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Oct. 24, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takeo Tsukamoto, Kawasaki, JP;

Takao Ogura, Yokohama, JP;

Shuji Yamada, Atsugi, JP;

Yoichi Ikarashi, Fujisawa, JP;

Nobuhiro Ito, Yamato, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/02 (2006.01); H01J 35/32 (2006.01); H01J 35/08 (2006.01); C23C 16/06 (2006.01); G01N 23/04 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); C23C 16/06 (2013.01); G01N 23/04 (2013.01); H01J 35/32 (2013.01); H01J 2235/081 (2013.01); H01J 2235/087 (2013.01);
Abstract

The present invention relates to a transmission type target having a diamond base material as the transmissive base material. The transmission type target includes a target layer containing a metal carbide constituted of at least one metal selected from the group consisting of molybdenum, tantalum, and tungsten and carbon; and a diamond base material supporting the target layer. The transmission type target inhibits the composition of the target layer from varying with the drive history of the transmission type target and inhibits the output of radiation from varying over a long time.


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