The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Jun. 17, 2011
Sentaro Aihara, Utsunomiya, JP;
Sentaro Aihara, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
Provided is an imprinting method that is capable of strictly performing the interpolation of the application distribution of an uncured resin material to be applied to a substrate for each shot as well as efficiently performing the reinterpolation of the application distribution of the uncured resin material for each shot while reducing the workload in a generation step. The imprinting apparatus of the present invention includes a moldon which a mold pattern is formed; a mold driving unitthat allows the moldmove toward and away from a substrate; a dispenserthat applies an uncured resin material to the substrate; a light sourcethat cures the uncured resin material as a resin pattern; a dispenser control unitthat controls the dispenserby generating the application distribution of the uncured resin material to the resin pattern for each of a plurality of shots; and a main control unitthat interpolates the application distribution of the uncured resin material, which has been generated by the dispenser control unit, using shot layout information in consideration of the relative position among the positions of a plurality of shots, the dispenser, and the light sourcewith respect to the substrate, as variables.