The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
May. 05, 2015
Applicant:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Inventors:
Jen-Huang Albert Chiou, Libertyville, IL (US);
Shiuh-Hui Steven Chen, Lake Zurich, IL (US);
Assignee:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); H01L 41/332 (2013.01); H01L 41/23 (2013.01); H01L 41/312 (2013.01); H01L 41/113 (2006.01); B81B 3/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0054 (2013.01); B81B 3/00 (2013.01); B81B 7/02 (2013.01); B81C 1/00 (2013.01); G01L 9/0042 (2013.01); G01L 9/0047 (2013.01); G01L 9/0052 (2013.01); H01L 41/1132 (2013.01); H01L 41/23 (2013.01); H01L 41/312 (2013.01); H01L 41/332 (2013.01);
Abstract
The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device with corner trench. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener to the bottom side of the diaphragm. A rim, anchors, and a stiffener pad can also be added to further stiffen the thinner diaphragm and further reduce pressure nonlinearity.