The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Apr. 10, 2014
Applicant:

Soraa, Inc., Fremont, CA (US);

Inventors:

Mark P. D'Evelyn, Santa Barbara, CA (US);

Wenkan Jiang, Santa Barbara, CA (US);

Derrick S. Kamber, Goleta, CA (US);

Rajeev T. Pakalapati, Santa Barbara, CA (US);

Michael R. Krames, Mountain View, CA (US);

Assignee:

Soraa, Inc., Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 7/10 (2006.01); C30B 9/00 (2006.01); C30B 29/40 (2006.01); C30B 25/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 7/105 (2013.01); C30B 7/10 (2013.01); C30B 9/00 (2013.01); C30B 25/02 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/02389 (2013.01);
Abstract

Large area seed crystals for ammonothermal GaN growth are fabricated by deposition or layer transfer of a GaN layer on a CTE-matched handle substrate. The sides and back of the handle substrate are protected from the ammonothermal growth environment by a coating comprising an adhesion layer, a diffusion barrier layer, and an inert layer. A patterned mask, also comprising an adhesion layer, a diffusion barrier layer, and an inert layer, may be provided over the GaN layer to allow for reduction of the dislocation density by lateral epitaxial growth.


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