The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Jun. 05, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventors:
Seung-Ho Choi, Yongin, KR;
Yong-Suk Lee, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); C23C 14/54 (2006.01); H01L 51/00 (2006.01); C23C 14/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/545 (2013.01); C23C 14/0042 (2013.01); C23C 14/544 (2013.01); H01J 37/32935 (2013.01); H01J 37/3405 (2013.01); H01J 37/347 (2013.01); H01L 51/0008 (2013.01);
Abstract
One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.