The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Jun. 04, 2015
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Mirko Hattass, Stuttgart, DE;

Heiko Stahl, Reutlingen, DE;

Jochen Reinmuth, Reutlingen, DE;

Julian Gonska, Reutlingen, DE;

Johannes Classen, Reutlingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00269 (2013.01); B81B 7/007 (2013.01); B81C 3/001 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/035 (2013.01); B81C 2203/054 (2013.01);
Abstract

Measures are provided for improving and simplifying metallic bonding processes which enable a reliable initiation of the bonding process and thus contribute to a uniform bonding. The present method provides a further option for using bonding layers. The method in the case of which the two semiconductor elements are bonded to one another via a bond of at least one metallic starting layer and at least one further starting layer provides that the two starting layers are structured in such a way that the layer areas which are assigned to one another have differently sized areal extents. Moreover, the layer thicknesses of the two starting layers should be selected in such a way that the layer areas which are assigned to one another meet the material ratio necessary for the bonding process.


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