The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Aug. 19, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Andrew Nguyen, San Jose, CA (US);
Tza-Jing Gung, San Jose, CA (US);
Haitao Wang, Sunnyvale, CA (US);
Maxim Mikhailovich Noginov, Sunnyvale, CA (US);
Reza Sadjadi, San Jose, CA (US);
Chunlei Zhang, Santa Clara, CA (US);
Xue Yang, San Mateo, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/3065 (2006.01); C23C 16/50 (2006.01); C23C 16/455 (2006.01); C23C 14/22 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3065 (2013.01); C23C 14/22 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); H01J 37/32082 (2013.01); H01J 37/32669 (2013.01); H01L 21/02274 (2013.01);
Abstract
Implementations described herein provide a magnetic ring which enables both lateral and azimuthal tuning of the plasma in a processing chamber. In one embodiment, the magnetic ring has a body. The body has a top surface and a bottom surface, and a plurality of magnets are disposed on the bottom surface of the body.