The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2017

Filed:

Apr. 29, 2015
Applicants:

International Business Machines Corporation, Armonk, NY (US);

Egypt Nanotechnologies Center (Egnc), Cairo-Alexandria Desert Road, EG;

Inventors:

Ali Afzali-Ardakani, Ossining, NY (US);

Ahmed Maarouf, Cortlandt Manor, NY (US);

Glenn J. Martyna, Croton on Hudson, NY (US);

Katherine Saenger, Ossining, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/04 (2006.01); H01L 21/324 (2006.01); H01L 21/02 (2006.01); B32B 15/20 (2006.01); B32B 9/00 (2006.01); B32B 3/12 (2006.01); C23F 1/02 (2006.01); B32B 3/00 (2006.01); B82Y 40/00 (2011.01); C01B 31/04 (2006.01); H01B 13/00 (2006.01); B82Y 30/00 (2011.01); B32B 9/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/042 (2013.01); B32B 3/00 (2013.01); B32B 3/12 (2013.01); B32B 9/007 (2013.01); B32B 9/041 (2013.01); B32B 15/20 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 31/0446 (2013.01); C23F 1/02 (2013.01); H01B 13/00 (2013.01); H01L 21/02527 (2013.01); H01L 21/324 (2013.01); B32B 2307/202 (2013.01); B32B 2307/206 (2013.01); B32B 2457/00 (2013.01); Y10T 428/24545 (2015.01);
Abstract

An apparatus and method for forming a patterned graphene layer on a substrate. One such method includes forming at least one patterned structure on a substrate; applying a layer of graphene on top of the at least one patterned structure on the substrate; heating the layer of graphene on top of the at least one patterned structure to remove one or more graphene regions proximate to the at least one patterned structure; and removing the at least one patterned structure to produce a patterned graphene layer on the substrate, wherein the patterned graphene layer on the substrate provides carrier mobility for electronic devices.


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