The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Nov. 07, 2014
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventor:
Yuichi Hamada, Annaka, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/38 (2012.01); G03F 1/64 (2012.01); B32B 37/12 (2006.01); B32B 37/18 (2006.01); B32B 41/00 (2006.01); G03F 7/20 (2006.01); G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
G03F 1/38 (2013.01); B32B 37/12 (2013.01); B32B 37/18 (2013.01); B32B 41/00 (2013.01); G03F 1/62 (2013.01); G03F 1/64 (2013.01); B32B 2559/00 (2013.01); G03F 1/142 (2013.01); G03F 7/70983 (2013.01); Y10T 156/10 (2015.01);
Abstract
Here is proposed a method for bonding a pellicle to a stencil such as mask plate, which is characteristic in that the stencil-bonding agglutinant layer of the pellicle is warmed under load while the pellicle is being bonded to the stencil, preferably at a temperature in a range of 35 through 80 degrees C., and the load is increased stepwise and with intermittent removal of the load.