The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Dec. 29, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventors:
Assignee:
Samsung Display Co., ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); C23C 16/54 (2006.01); C23C 14/04 (2006.01); C23C 14/56 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/545 (2013.01); C23C 14/042 (2013.01); C23C 14/56 (2013.01); H01L 51/0011 (2013.01);
Abstract
Disclosed is a thin film deposition apparatus and a method of manufacturing an organic light-emitting display apparatus by using the thin film deposition apparatus. The thin film deposition apparatus and the method of manufacturing the organic light-emitting display apparatus using the thin film deposition apparatus reduce manufacturing time and cost.