The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Apr. 20, 2011
Juergen Hotz, Muenster, DE;
Pavel Seserko, Karlstein, DE;
Joerg Wittich, Otzberg, DE;
Helmut Eberhardt, Gruendau, DE;
Manfred Kirschner, Michelstadt, DE;
Wolfgang Rieth, Gelnhausen, DE;
Juergen Hotz, Muenster, DE;
Pavel Seserko, Karlstein, DE;
Joerg Wittich, Otzberg, DE;
Helmut Eberhardt, Gruendau, DE;
Manfred Kirschner, Michelstadt, DE;
Wolfgang Rieth, Gelnhausen, DE;
ALD Vacuum Technologies GmbH, Hanau, DE;
Abstract
An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.