The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Aug. 09, 2013
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Inventors:
Seung-Jun Lee, Yongin, KR;
Jung-Hwa You, Yongin, KR;
Sohra Hahn, Yongin, KR;
Dong-Myung Shin, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/02 (2006.01); B08B 1/04 (2006.01); B08B 3/04 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); B08B 1/00 (2006.01);
U.S. Cl.
CPC ...
B08B 1/02 (2013.01); B08B 1/04 (2013.01); B08B 3/041 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01); H01L 21/6776 (2013.01); H01L 21/67706 (2013.01); B08B 1/002 (2013.01);
Abstract
A substrate cleaning apparatus is provided. The substrate cleaning apparatus includes a plurality of transfer rollers for transferring a substrate; a liquid chemical feeder supplying a liquid chemical to a first surface of the substrate; wherein the liquid chemical feeder comprises a first housing and a first cleaning roller rotatably installed within the housing and having an upper portion configured to contact with the substrate.