The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Jun. 30, 2014
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Johann Massoner, Villach, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01); H04R 31/00 (2006.01); H04R 19/00 (2006.01); B81C 1/00 (2006.01); H04R 7/10 (2006.01);
U.S. Cl.
CPC ...
H04R 31/003 (2013.01); B81C 1/00658 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); H04R 7/10 (2013.01); H04R 2307/023 (2013.01);
Abstract
A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene.