The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Jun. 23, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Lawrence A. Clevenger, Rhinebeck, NY (US);

Chandrasekhar Narayan, San Jose, CA (US);

Gregory A. Northrop, Ballston Spa, NY (US);

Carl J. Radens, LaGrangeville, NY (US);

Brian C. Sapp, Guilderland, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 29/775 (2006.01); H01L 29/66 (2006.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01); H01L 29/06 (2006.01); H01L 51/05 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0048 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 29/0673 (2013.01); H01L 29/66439 (2013.01); H01L 29/775 (2013.01); H01L 51/0012 (2013.01); H01L 51/0541 (2013.01); Y10S 977/742 (2013.01); Y10S 977/842 (2013.01);
Abstract

Embodiments of the present invention provide a method of forming carbon nanotube based semiconductor devices. The method includes creating a guiding structure in a substrate for forming a device; dispersing a plurality of carbon nanotubes inside the guiding structure, the plurality of carbon nanotubes having an orientation determined by the guiding structure; fixating the plurality of carbon nanotubes to the guiding structure; and forming one or more contacts to the device. Structure of the formed carbon nanotube device is also provided.


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