The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
May. 11, 2015
Applicant:
Global Solar Energy, Inc., Tucson, AZ (US);
Inventors:
Assignee:
Global Solar Energy, Inc., Tucson, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 31/18 (2006.01); C23C 18/12 (2006.01); H01L 31/0392 (2006.01); H01L 31/0749 (2012.01); H01L 31/032 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 18/12 (2013.01); H01L 31/0322 (2013.01); H01L 31/03928 (2013.01); H01L 31/0749 (2013.01); H01L 31/1836 (2013.01); Y02E 10/541 (2013.01); Y02P 70/521 (2015.11);
Abstract
Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.