The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Aug. 31, 2016
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventor:

Toshitaka Miyata, Ota Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 29/49 (2006.01); H01L 29/423 (2006.01); H01L 21/28 (2006.01); H01L 29/08 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4983 (2013.01); H01L 21/28114 (2013.01); H01L 21/82345 (2013.01); H01L 21/823842 (2013.01); H01L 29/0847 (2013.01); H01L 29/4238 (2013.01); H01L 29/42372 (2013.01); H01L 29/42376 (2013.01); H01L 29/6653 (2013.01); H01L 21/28518 (2013.01);
Abstract

According to one embodiment, a semiconductor device includes a substrate and a gate electrode. The gate electrode includes a first electrode formed on the substrate, the first electrode having a first conductive property, with a first insulating film between the first electrode and the substrate, and a second electrode formed on the substrate, the second electrode having a second conductive property different from the first conductive property, with a second insulating film between the second electrode and the substrate. The first electrode is formed in a rectangular shape having a hollow portion. A slit is formed in a side surface of the first electrode extending in a width direction of the gate electrode. The second electrode is formed in the slit and along the side surface of the first electrode that has the slit.


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