The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Feb. 11, 2016
Applicant:

Dongbu Hitek Co., Ltd., Seoul, KR;

Inventor:

Yong Soo Cho, Daejeon, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 27/06 (2006.01); H01L 49/02 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 23/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1203 (2013.01); H01L 23/66 (2013.01); H01L 27/0629 (2013.01); H01L 28/10 (2013.01); H01L 28/40 (2013.01); H01L 29/0619 (2013.01); H01L 29/0649 (2013.01); H01L 29/1079 (2013.01);
Abstract

In embodiments, a radio frequency (RF) module includes an RF switching device, an RF active device, a passive device and a control device formed on a high resistivity substrate. The passive device can include a shallow trench device isolation region having a plate shape and formed at a surface portion of the high resistivity substrate, deep trench device isolation regions extending downward from a lower surface of the shallow trench device isolation region so as to define at least one isolated region therebetween, at least one insulating layer formed on the high resistivity substrate, and at least one passive component formed on the insulating layer.


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