The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Sep. 30, 2016
Applicant:

Institute of Physics, Chinese Academy of Sciences, Beijing, CN;

Inventors:

Guoqiang Yu, Beijing, CN;

Peng Guo, Beijing, CN;

Xiufeng Han, Beijing, CN;

Chaohui Guo, Beijing, CN;

Xiaoyu Sun, Beijing, CN;

Xiangqian Zhou, Beijing, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/09 (2006.01); H01F 41/00 (2006.01); G01R 33/09 (2006.01); H01L 43/12 (2006.01); H01F 7/20 (2006.01); H01J 37/141 (2006.01);
U.S. Cl.
CPC ...
H01J 37/09 (2013.01); G01R 33/093 (2013.01); G01R 33/096 (2013.01); H01F 7/202 (2013.01); H01F 7/204 (2013.01); H01F 41/00 (2013.01); H01J 37/141 (2013.01); H01L 43/12 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/0264 (2013.01); H01J 2237/28 (2013.01); H01J 2237/31754 (2013.01);
Abstract

A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device, which comprises a power supply, a magnetic-field generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, which is wound on the soft iron core to generate a magnetic field. The soft iron core is of a semi-closed frame structure and the magnetic poles are at the ends of the frame structure. The stage is inside a vacuum chamber. The poles are oppositely arranged inside the vacuum chamber relative to the stage. The coil and the soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the stage and apply a local magnetic field.


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