The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Oct. 24, 2014
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Steven Douglas Slonaker, San Mateo, CA (US);
Assignee:
Nikon Corporation, , JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03B 27/72 (2006.01); G03F 1/00 (2012.01); G03F 7/20 (2006.01); B01L 3/00 (2006.01); G01N 15/00 (2006.01); G01N 15/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70083 (2013.01); B01L 3/5027 (2013.01); B01L 3/502707 (2013.01); G03F 7/7035 (2013.01); G03F 7/70191 (2013.01); G03F 7/70283 (2013.01); G03F 7/70291 (2013.01); G03F 7/70558 (2013.01); G03F 7/70583 (2013.01); G01N 15/1463 (2013.01); G01N 15/1475 (2013.01); G01N 2015/0065 (2013.01);
Abstract
An imaging assembly for directing a pattern of energy at a workpiece includes (i) a reticle that defines a reticle array that includes a plurality of spaced apart, transmitting regions; (ii) an illumination source that generates an illumination beam; and (iii) a director assembly that selectively directs the illumination beam at the reticle array, the director assembly includes a plurality of director elements that are individually controlled to selectively control the beam pattern that is directed at the reticle array.