The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Nov. 25, 2013
Applicant:

Ccs Inc., Kyoto-shi, Kyoto, JP;

Inventor:

Shigeki Masumura, Kyoto, JP;

Assignee:

CCS Inc., Kyoto-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01N 2021/8822 (2013.01);
Abstract

In order to provide an inspection illumination device that makes it possible to greatly change a light amount within an observation solid angle of an imaging device even in a case where a change in reflection or scattering taking place at a feature point is subtle, and thus detect such a minute feature point, the inspection illumination device includes: a surface light source that emits inspection light; a lens that is arranged between the surface light source and an inspection object, and provides an image of the surface light source near the inspection object; and a first light shielding mask that is arranged between the surface light source and the inspection object, and forms a dark domain within an illumination solid angle of the inspection light applied to each point on the inspection object.


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