The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Feb. 11, 2013
Applicant:

Fhr Anlagenbau Gmbh, Ottendorf-Okrilla, DE;

Inventors:

Lutz Köhler, Radebeul, DE;

Daniel Michel, Grossenhain, DE;

Anthony Nobel, Elsterheide, DE;

Marco Grafe, Dresden, DE;

Assignee:

FHR Anlagenbau GmbH, Ottendorf-Okrilla, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 16/02 (2006.01); C23C 16/46 (2006.01); C23C 14/54 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/562 (2013.01); C23C 14/541 (2013.01); C23C 16/0209 (2013.01); C23C 16/46 (2013.01); C23C 16/54 (2013.01);
Abstract

A process roller for receiving and guiding substrates in strip form in vacuum coating installations. The process roller comprises a heater located inside the process roller, in the form of an elongated radiant heater, and also a cylindrical lateral surface for receiving a substrate in strip form, the process roller being mounted rotatably about an axis of rotation in a vacuum process chamber. A particularly uniform temperature distribution can be achieved on the process roller's lateral surface by the process roller () being configured in a vacuum-tight manner, by the lateral surface () of the process roller () being connected in a vacuum-tight manner to two end caps (), which have a flattened, outwardly curved hemispherical form, by the interior space of the process roller () being connected to a vacuum connection (), and by the radiant heater () extending into the region of the end caps ().


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