The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

May. 30, 2014
Applicant:

Avago Technologies General Ip (Singapore) Pte. Ltd., Singapore, SG;

Inventors:

Dariusz Burak, Fort Collins, CO (US);

Stefan Bader, Fort Collins, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H03H 9/17 (2006.01); H01L 41/107 (2006.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H03H 9/17 (2013.01); H01L 41/047 (2013.01); H01L 41/107 (2013.01); H03H 9/131 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01);
Abstract

A bulk acoustic wave (BAW) resonator having a vertically extended acoustic cavity is provided. The BAW resonator includes a bottom electrode disposed on a substrate over a cavity formed in the substrate; a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer. The piezoelectric layer has a thickness of approximately λ/2, wherein λ is a wavelength corresponding to a thickness extensional resonance frequency of the BAW resonator. At least one of the bottom electrode and the top electrode comprises a composite electrode having a thickness of approximately λ/2.


Find Patent Forward Citations

Burak, Dariusz. (2017). Acoustic resonator comprising vertically extended acoustic cavity (U.S. Patent No. 9634642). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9634642

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…