The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Jan. 23, 2013
Applicant:

Tetrasun, Inc., San Jose, CA (US);

Inventors:

Adrian Bruce Turner, Palo Alto, CA (US);

Qing Yuan Ong, San Leandro, CA (US);

Oliver Schultz-Wittmann, Sunnyvale, CA (US);

Assignee:

TETRASUN, INC., San Jose, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); B23K 26/40 (2014.01); H01L 21/768 (2006.01); H01L 31/0216 (2014.01); H01L 31/0224 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1868 (2013.01); B23K 26/40 (2013.01); H01L 21/76894 (2013.01); H01L 31/02168 (2013.01); H01L 31/022425 (2013.01); H01L 31/022433 (2013.01); H01L 31/022441 (2013.01); H01L 31/1884 (2013.01); H01L 31/1888 (2013.01); Y02E 10/50 (2013.01); Y02E 10/52 (2013.01);
Abstract

A method and resulting structure of patterning a metal film pattern over a substrate, including forming a metal film pattern over the substrate; depositing a coating over the substrate surface and the metal film pattern; and removing the coating over the metal film pattern by laser irradiation. The substrate and coating do not significantly interact with the laser irradiation, and the laser irradiation interacts with the metal film pattern and the coating, resulting in the removal of the coating over the metal film pattern. The invention offers a technique for the formation of a metal pattern surrounded by a dielectric coating for solar cells, where the dielectric coating may function as an antireflection coating on the front surface, internal reflector on the rear surface, and may further may function as a dielectric barrier for subsequent electroplating of metal patterns on either surface.


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