The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Jan. 08, 2014
Applicant:

Ascent Solar Technologies, Inc., Thornton, CO (US);

Inventors:

Lawrence M. Woods, Littleton, CO (US);

Rosine Ribelin, Lakewood, CO (US);

Joseph H. Armstrong, Littleton, CO (US);

Assignee:

ASCENT SOLAR TECHNOLOGIES, INC., Thornton, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/032 (2006.01); H01L 31/0392 (2006.01); H01L 21/67 (2006.01); C23C 14/00 (2006.01); C23C 14/20 (2006.01); C23C 14/54 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 14/0021 (2013.01); C23C 14/20 (2013.01); C23C 14/541 (2013.01); H01L 21/67115 (2013.01); H01L 31/0322 (2013.01); H01L 31/03928 (2013.01); H01L 21/02422 (2013.01); H01L 21/02568 (2013.01); Y02E 10/541 (2013.01);
Abstract

A method for depositing one or more thin-film layers on a flexible polyimide substrate having opposing front and back outer surfaces includes the following steps: (a) heating the flexible polyimide substrate such that a temperature of the front outer surface of the flexible polyimide substrate is higher than a temperature of the back outer surface of the flexible polyimide substrate, and (b) depositing the one or more thin-film layers on the front outer surface of the flexible polyimide substrate. A deposition zone for executing the method includes (a) one of more physical vapor deposition sources adapted to deposit one or more metallic materials on the front outer surface of the substrate, and (b) one or more radiant zone boundary heaters.


Find Patent Forward Citations

Loading…