The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Jan. 30, 2015
Applicant:

Electronics and Telecommunications Research Institute, Daejeon, KR;

Inventors:

Kyoung Ik Cho, Daejeon, KR;

Jae Bon Koo, Daejeon, KR;

Chan Woo Park, Daejeon, KR;

Bock Soon Na, Daejeon, KR;

Sang Seok Lee, Sejong, KR;

Sang Chul Lim, Daejeon, KR;

Soon-Won Jung, Daejeon, KR;

Hye Yong Chu, Daejeon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/10 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H01L 27/12 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66742 (2013.01); H01L 21/3105 (2013.01); H01L 21/31058 (2013.01); H01L 27/1218 (2013.01); H01L 27/1266 (2013.01); H01L 29/78603 (2013.01);
Abstract

Provided is a method for fabricating an electronic device, the method including: preparing a carrier substrate including an element region and a wiring region; forming a sacrificial layer on the carrier substrate; forming an electronic element on the sacrificial layer of the element region; forming a first elastic layer having a corrugated surface on the first elastic layer of the wiring region; forming a metal wirings electrically connecting the electronic element thereto, on the first elastic layer of the wiring region; forming a second elastic layer covering the metal wirings, on the first elastic layer; forming a high rigidity pattern filling in a recess of the second elastic layer above the electronic element so as to overlap the electronic element, and having a corrugated surface; forming a third elastic layer on the second elastic layer and the high rigidity pattern; and separating the carrier substrate.


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