The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Jun. 02, 2016
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventor:

Takuya Mizutani, Yokkaichi, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/485 (2006.01); H01L 23/528 (2006.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 23/538 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5283 (2013.01); H01L 21/76816 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 27/1157 (2013.01); H01L 27/11582 (2013.01); H01L 23/4855 (2013.01); H01L 23/5386 (2013.01); H01L 25/0657 (2013.01);
Abstract

According to one embodiment, there is provided a semiconductor device, which includes an electrode lead-out part, a planarization film, contacts, and first and second columnar patterns. The electrode lead-out part is arranged such that an electrode film and an insulating film are alternately stacked in a plurality of layers, and layers of the electrode film are arranged stepwise. The planarization film is arranged above the electrode lead-out part. The first columnar pattern extends from a lowermost portion of the electrode lead-out part to a position lower than the upper side of the planarization film by a first depth. The second columnar pattern extends from a lowermost portion of the electrode lead-out part to a position lower than the upper side of the planarization film by a second depth larger than the first depth.


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