The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Oct. 14, 2014
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Shi Shu, Beijing, CN;

Zhijun Lv, Beijing, CN;

Jingxia Gu, Beijing, CN;

Yue Shi, Beijing, CN;

Fangzhen Zhang, Beijing, CN;

Bing Sun, Beijing, CN;

Chuanxiang Xu, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/3205 (2006.01); H01L 23/498 (2006.01); H05K 3/06 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76892 (2013.01); H01L 21/3081 (2013.01); H01L 21/32055 (2013.01); H01L 23/49877 (2013.01); H05K 3/064 (2013.01); H01L 2924/0002 (2013.01); H05K 2201/0108 (2013.01); H05K 2201/0323 (2013.01); H05K 2201/10128 (2013.01);
Abstract

The invention provides a method for patterning a graphene layer and a method for manufacturing a display substrate. The method for patterning a graphene layer comprises: forming an isolation layer on a graphene layer; forming a photoresist layer on the isolation layer; patterning the photoresist layer; etching the isolation layer according to the patterned photoresist layer to form a patterned isolation layer; etching the graphene layer according to the patterned photoresist layer to form a patterned graphene layer; and removing the patterned isolation layer. In the method of the invention, the unfavorable condition of the prior art may be avoided that a graphene film sloughs off or a photoresist remains on a graphene film when a photoresist material is peeled off, and the product yield can be improved in the case that the production cost is controlled.


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