The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Sep. 17, 2015
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-Do, KR;

Inventors:

Joowoan Cho, Yongin-si, KR;

Byoungho Cheong, Yongin-si, KR;

Byoungkwon Choo, Yongin-si, KR;

Jeongkyun Na, Yongin-si, KR;

Sanghoon Ahn, Yongin-si, KR;

Hyunjin Cho, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/04 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); B23K 26/00 (2013.01); H01L 21/02532 (2013.01); H01L 21/02691 (2013.01); H01L 29/04 (2013.01); H01L 29/16 (2013.01); H01L 29/6675 (2013.01);
Abstract

A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.


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