The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Mar. 07, 2014
Applicant:

Okinawa Institute of Science and Technology School Corporation, Okinawa, JP;

Inventors:

Vidya Dhar Singh, Okinawa, JP;

Cathal Cassidy, Okinawa, JP;

Mukhles Ibrahim Sowwan, Okinawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 1/02 (2006.01); C30B 28/02 (2006.01); C30B 29/06 (2006.01); C30B 29/60 (2006.01); H01L 29/04 (2006.01); H01L 29/16 (2006.01); C01B 33/021 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02658 (2013.01); C30B 1/023 (2013.01); C30B 28/02 (2013.01); C30B 29/06 (2013.01); C30B 29/60 (2013.01); H01L 21/02532 (2013.01); H01L 21/02601 (2013.01); H01L 21/02631 (2013.01); H01L 29/04 (2013.01); H01L 29/16 (2013.01); C01B 33/021 (2013.01);
Abstract

A method of forming crystallized semiconductor particles includes: forming amorphous semiconductor particles in a vacuumed aggregation chamber; transporting the amorphous semiconductor particles formed in the vacuumed aggregation chamber to a vacuumed deposition chamber within which a substrate is held; and applying a vapor of a metal catalyst to the amorphous semi-conductor particles while still in transit to the substrate in the vacuumed deposition chamber to induce crystallization of at least portion of the amorphous semiconductor particles via the metal catalyst in the transit, thereby depositing the crystallized semiconductor particles with the metal catalyst attached thereto onto the substrate.


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