The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Mar. 14, 2013
Applicant:
Cardinal CG Company, Spring Green, WI (US);
Inventors:
Keith J. Burrows, Mineral Point, WI (US);
Christopher L. Gruber, Plain, WI (US);
Klaus H. W. Hartig, Avoca, WI (US);
Assignee:
Cardinal CG Company, Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/32 (2006.01); C23C 14/54 (2006.01); C23C 14/00 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32449 (2013.01); C23C 14/0042 (2013.01); C23C 14/54 (2013.01); C23C 14/542 (2013.01); C23C 14/544 (2013.01); H01J 37/3244 (2013.01); H01J 37/32972 (2013.01); H01J 37/34 (2013.01);
Abstract
A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.