The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Oct. 30, 2012
Applicant:
Kyocera Corporation, Kyoto-shi, Kyoto, JP;
Inventor:
Atsushi Tanaka, Koka, JP;
Assignee:
Kyocera Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C04B 35/443 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C04B 35/44 (2006.01); C04B 35/505 (2006.01); C04B 35/626 (2006.01); B24B 37/00 (2012.01); B24B 37/04 (2012.01); C04B 35/03 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3244 (2013.01); B24B 37/00 (2013.01); B24B 37/04 (2013.01); C04B 35/03 (2013.01); C04B 35/44 (2013.01); C04B 35/443 (2013.01); C04B 35/505 (2013.01); C04B 35/6261 (2013.01); C04B 35/62645 (2013.01); C04B 35/62655 (2013.01); C04B 35/62695 (2013.01); C23C 16/4404 (2013.01); C23C 16/45563 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/786 (2013.01); C04B 2235/94 (2013.01); C04B 2235/963 (2013.01); C04B 2235/9669 (2013.01);
Abstract
[Object] To provide a gas nozzle which meets a requirement to suppress the fall of particles. [Solution] A gas nozzleaccording to an aspect of the present invention includes a columnar main bodyformed of a ceramic sintered body provided with a through-holeformed therein through which a gas flows, an exhaust portof the through-holefor the gas is formed in one end surface Sof the main body, and the mean width of the profile elements (Rsm) of the one end surface Sis 5 times or more the average crystalline grain diameter of the ceramic sintered body.