The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Jun. 15, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Yoshikuni Yoneyama, Utsunomiya, JP;

Kentaro Hiruma, Saitama, JP;

Noboru Osaka, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 19/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70141 (2013.01); G02B 19/0028 (2013.01); G02B 19/0047 (2013.01); G03F 7/7005 (2013.01); G03F 7/70091 (2013.01); G03F 7/70133 (2013.01);
Abstract

An illumination device includes a plurality of light source units, each including a light source, a mirror that reflects light from the light source, and one or more light blocking members that block the light that is reflected by the mirror and travels toward the illumination surface; and an illumination optical system that forms a light intensity distribution of superposed light, in which the light from each of the light source units is superposed, in a pupil plane and illuminates the illumination surface with the superposed light. In the light intensity distribution in the pupil plane of the illumination optical system, positions of shadows of all of the light blocking members included in one of the light source units are separated from positions of shadows of all of the light blocking members included in at least one of the remaining light source units.


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