The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

Feb. 06, 2015
Applicant:

Sumitomo Heavy Industries, Ltd., Tokyo, JP;

Inventor:

Kazumasa Shudo, Yokosuka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/12 (2006.01); H01L 21/268 (2006.01); H01L 21/324 (2006.01); H01L 29/66 (2006.01); G02B 19/00 (2006.01); G02B 27/09 (2006.01); H01S 5/40 (2006.01); H01S 5/022 (2006.01);
U.S. Cl.
CPC ...
G02B 27/123 (2013.01); G02B 19/0057 (2013.01); G02B 27/0927 (2013.01); G02B 27/0961 (2013.01); H01L 21/268 (2013.01); H01L 21/324 (2013.01); H01L 29/66348 (2013.01); H01S 5/4012 (2013.01); H01S 5/02284 (2013.01);
Abstract

A semiconductor laser oscillator is formed by laser diodes arranged two-dimensionally in fast-axis and slow-axis directions. A laser beam emitted from the semiconductor laser oscillator is incident on a homogenizer. The homogenizer condenses the laser beam onto a long-length incident region at a surface to be irradiated. The homogenizer divides the laser beam into a plurality of beams with respect to a short-axis direction of the incident region, and superimposes the plurality of divided beams at the surface to be irradiated to cause the superimposed beams to be incident on the incident region. The slow-axis direction of the semiconductor laser oscillator is inclined with respect to a long-axis direction of the incident region.


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