The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Sep. 28, 2012
Applicant:
Panasonic Corporation, Osaka, JP;
Inventors:
Shigehiro Yoshiuchi, Kyoto, JP;
Satoshi Ohuchi, Hyogo, JP;
Tsuyoshi Fujii, Osaka, JP;
Kensaku Yamamoto, Fukui, JP;
Hideo Ohkoshi, Fukui, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01C 19/5769 (2012.01); B81B 7/00 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); B81B 7/0048 (2013.01); G01C 19/5769 (2013.01); H01L 24/32 (2013.01); B81B 2201/025 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/73265 (2013.01);
Abstract
An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (), that is, an inertial force sensor includes ceramic substrate (), lower lid () adhering to ceramic substrate () with adhesives (and) (first adhesives), and sensor element () adhering to lower lid () with adhesives (and) (second adhesives). The elastic moduli of adhesives (and) are smaller than those of adhesives (and).