The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2017

Filed:

May. 22, 2015
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Philippe Robert, Grenoble, FR;

Loic Joet, Grenoble, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 5/14 (2006.01); G01D 5/241 (2006.01); B81C 1/00 (2006.01); H01G 5/16 (2006.01); B81B 3/00 (2006.01); G01P 15/125 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01D 5/2417 (2013.01); B81B 3/0021 (2013.01); B81C 1/00134 (2013.01); G01P 15/125 (2013.01); H01G 5/14 (2013.01); H01G 5/16 (2013.01); B81B 2201/033 (2013.01); B81B 2203/051 (2013.01); G01P 2015/0814 (2013.01);
Abstract

A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.


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