The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Jan. 21, 2010
Applicants:
Michael Roger Czerniak, Wellington, GB;
Gareth David Stanton, Clevedon, GB;
Inventors:
Michael Roger Czerniak, Wellington, GB;
Gareth David Stanton, Clevedon, GB;
Assignee:
Edwards Limited, Crawley, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25D 17/06 (2006.01); F23G 7/06 (2006.01); B01D 53/79 (2006.01); F23J 15/06 (2006.01);
U.S. Cl.
CPC ...
F23G 7/065 (2013.01); B01D 53/79 (2013.01); F23J 15/06 (2013.01); F23G 2204/103 (2013.01); F23G 2207/50 (2013.01); F23G 2209/142 (2013.01); F23J 2219/80 (2013.01); Y02E 20/363 (2013.01);
Abstract
The present invention provides a method of treating an exhaust gas streamfrom a processing chamber. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangementor atmospheric line; abating the exhaust gas in an abatement regionof an abatement device; and injecting a cooling agent, such as a liquid, downstream of the abatement region to cool the abated gases in a cooling regionby phase change of the cooling agent.