The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Sep. 13, 2012
Min-seog Choi, Yongin-si, KR;
Seung-wan Lee, Yongin-si, KR;
Woon-bae Kim, Yongin-si, KR;
Eun-sung Lee, Yongin-si, KR;
Kyu-dong Jung, Yongin-si, KR;
Jong-hyeon Chang, Yongin-si, KR;
Min-seog Choi, Yongin-si, KR;
Seung-wan Lee, Yongin-si, KR;
Woon-bae Kim, Yongin-si, KR;
Eun-sung Lee, Yongin-si, KR;
Kyu-dong Jung, Yongin-si, KR;
Jong-hyeon Chang, Yongin-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A numerical aperture (NA) controlling unit and a variable optical probe including the same are provided. The NA controlling unit includes: an aperture adjustment unit which controls an aperture through which light is transmitted; and a focus control unit that is disposed in a predetermined position with respect to the aperture adjustment unit, that focuses light transmitted through the aperture, and that has an adjustable focal length. The variable optical probe includes: a light transmission unit; a collimator that collimates light transmitted through the light transmission unit into parallel light; an NA controlling unit that focuses light on a sample to be inspected; and a scanner that varies a path of light transmitted through the light transmission unit such that a predetermined region of the sample is scanned by light that passes through the NA controlling unit.