The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2017

Filed:

Nov. 14, 2014
Applicant:

Case Western Reserve University, Cleveland, OH (US);

Inventors:

Ting He, Cleveland, OH (US);

Fengchao Zhang, Cleveland, OH (US);

Swarup Bhunia, Cleveland, OH (US);

Philip X. -L. Feng, Cleveland, OH (US);

Assignee:

Case Western Reserve University, Cleveland, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/525 (2006.01); H03K 19/177 (2006.01); G11C 17/16 (2006.01); G01R 27/02 (2006.01); H01L 23/544 (2006.01); G11C 17/18 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 23/62 (2006.01);
U.S. Cl.
CPC ...
H03K 19/17768 (2013.01); G01R 27/025 (2013.01); G11C 17/16 (2013.01); G11C 17/18 (2013.01); H01L 23/5252 (2013.01); H01L 23/5382 (2013.01); H01L 23/544 (2013.01); H01L 23/573 (2013.01); H01L 23/576 (2013.01); H01L 24/49 (2013.01); H03K 19/17704 (2013.01); H03K 19/17724 (2013.01); H01L 23/62 (2013.01); H01L 24/32 (2013.01); H01L 24/48 (2013.01); H01L 24/73 (2013.01); H01L 2223/5444 (2013.01); H01L 2224/05554 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/49 (2013.01); H01L 2224/73265 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/15184 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/181 (2013.01); H01L 2924/19107 (2013.01);
Abstract

An antifuse apparatus can include a cantilever extending from a first electrode portion to terminate in a distal end. A second electrode portion can be spaced apart from the cantilever by an air gap. In response to a program voltage across the first and second electrode portions, the cantilever can be adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one permanent programmed condition, corresponding to a short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.


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