The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Jul. 09, 2014
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Kuang-woo Nam, Yongin-si, KR;
In-sang Song, Yongin-si, KR;
Chul-soo Kim, Yongin-si, KR;
Yun-kwon Park, Yongin-si, KR;
Eun-seok Park, Yongin-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/70 (2006.01); H03H 9/72 (2006.01); H03H 9/46 (2006.01); H03H 9/10 (2006.01); H03H 9/54 (2006.01); H03H 9/64 (2006.01); H03H 3/02 (2006.01); H03H 3/08 (2006.01); H03H 3/007 (2006.01);
U.S. Cl.
CPC ...
H03H 9/46 (2013.01); H03H 9/105 (2013.01); H03H 9/1092 (2013.01); H03H 9/54 (2013.01); H03H 9/64 (2013.01); H03H 3/02 (2013.01); H03H 3/08 (2013.01); H03H 9/703 (2013.01); H03H 9/706 (2013.01); H03H 9/72 (2013.01); H03H 9/725 (2013.01); H03H 2003/0071 (2013.01); Y10T 29/42 (2015.01);
Abstract
A method of fabricating a multi-band filter module is provided. The method includes forming a Film Bulk Acoustic Resonator (FBAR) on a piezoelectric substrate by forming a resonant part on the piezoelectric substrate and then an air gap recessed on a surface of the piezoelectric substrate and positioned under the resonant part; and forming a Surface Acoustic Wave (SAW) device on the piezoelectric substrate in which the steps of forming the FBAR and the SAW are concurrently performed.