The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2017

Filed:

Aug. 26, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Hideomi Kumano, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/808 (2006.01); H01L 29/10 (2006.01); H01L 27/146 (2006.01); H01L 21/266 (2006.01); H01L 21/265 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14679 (2013.01); H01L 21/266 (2013.01); H01L 21/26513 (2013.01); H01L 21/324 (2013.01); H01L 27/14612 (2013.01); H01L 27/14683 (2013.01); H01L 29/1058 (2013.01); H01L 29/66909 (2013.01); H01L 29/8083 (2013.01); H01L 27/14636 (2013.01);
Abstract

A method of manufacturing a junction field effect transistor having a channel region disposed in a semiconductor substrate, deeper than one of a source region and a drain region, the method includes a first step of forming a first mask having a first opening portion over the semiconductor substrate in which a first semiconductor region of a first conductivity type is disposed, a second step of forming a second semiconductor region of a second conductivity type defined as the channel region, in the first semiconductor region by implantation of ions of second conductivity type opposite to the first conductivity type using the first mask, and a third step of forming a third semiconductor region of the second conductivity type defined as the one of the source region and the drain region, by implantation of ions of the second conductivity type, using the first mask.


Find Patent Forward Citations

Loading…